Method for inspecting defect and system therefor
US6792359B2 · kind B2 · utility
15Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2001 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Feb 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24592
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.