Device for detaching a carrier from a semi-conductor disk
US6792991B2 · kind B2 · utility
34Cited by
7References
11Claims
0Family size
Inventor
Key dates
| Filing date | May 30, 2002 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | Jul 3, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/19
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention concerns a device for detaching a carrier that has been temporarily fixed on the top-most surface of a semi-conductor wafer from the semi-conductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.