Capacitor having a dielectric layer including a group 17 element
US6794700B1 · kind B1 · utility
3Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2003 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | Apr 14, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31155
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a capacitor 300, a method of manufacture therefor and an integrated circuit including the same. In one embodiment of the invention, the capacitor 300 includes a first conductive plate 320 located over a semiconductor substrate 310, wherein the first conductive plate 320 has a second conductive plate 340 located thereover. The capacitor 300, in the same embodiment, further includes a dielectric layer 330 located between the first conductive plate 320 and the second conductive plate 340, wherein the dielectric layer 330 includes a Group 17 element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.