Contact temperature probe and process
US6796711B2 · kind B2 · utility
8Cited by
25References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | Mar 29, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K1/143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contact measurement probe for measuring a temperature of a substrate in a process environment includes a probe head having a contact surface made of a ceramic material or a polymeric material for contacting the substrate. The contact measurement probe eliminates electrical biasing effects in process environments that include an ion source, thereby providing greater accuracy and reproducibility in temperature measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.