Design of hardware features to facilitate arc-spray coating applications and functions
US6797131B2 · kind B2 · utility
6Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2002 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | Nov 17, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for forming a coating on a sputter chamber workpiece. The apparatus generally includes a sputter chamber having at least one workpiece. The at least one workpiece generally includes one or more trenches formed therein, the trenches being configured to define an arc spray coating region. The method generally includes forming one or more trenches in the workpiece, the trenches defining a coating region and applying a metal coating to the coating region by arc spraying.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.