Electromagnetically levitated substrate support
US6800833B2 · kind B2 · utility
40Cited by
15References
27Claims
0Family size
Inventors
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Oct 5, 2004 |
| Priority date | — |
| Expiry date | Apr 25, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for supporting a substrate and a method for positioning a substrate include a substrate support, a stator circumscribing the substrate support, and an actuator. The actuator is coupled to the stator and adapted to change the elevation of the stator and/or adjust an angular orientation of the stator relative to its central axis. As the substrate support is magnetically coupled to the stator, a position, i.e., elevation and angular orientation, of the substrate support may be controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.