Mariusch Gregor
24Patents
7h-index
35Co-inventors
69Inventor score
Filing activity: Jul 15, 1997 → Dec 1, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5944049A | Apparatus and method for regulating a pressure in a chamber | Emerging Cross-Sectional Technologies | 199 | Expired |
| US6800833B2 | Electromagnetically levitated substrate support | Chemistry; Metallurgy | 40 | Expired |
| US8397739B2 | N-channel flow ratio controller calibration | Emerging Cross-Sectional Technologies | 21 | Active |
| US8205629B2 | Real time lead-line characterization for MFC flow verification | Emerging Cross-Sectional Technologies | 20 | Active |
| US8707754B2 | Methods and apparatus for calibrating flow controllers in substrate processing systems | Emerging Cross-Sectional Technologies | 8 | Active |
| US9004107B2 | Methods and apparatus for enhanced gas flow rate control | Emerging Cross-Sectional Technologies | 8 | Active |
| US10403476B2 | Active showerhead | Electricity | 8 | Active |
| US9200754B2 | N-channel flow ratio controller calibration | Emerging Cross-Sectional Technologies | 6 | Active |
| US8880210B2 | Methods and apparatus for processing substrates using model-based control | Electricity | 5 | Active |
| US10804079B2 | Active showerhead | Electricity | 3 | Active |
| US9772629B2 | Methods for monitoring a flow controller coupled to a process chamber | Emerging Cross-Sectional Technologies | 2 | Active |
| US10222810B2 | Methods for monitoring a flow controller coupled to a process chamber | Emerging Cross-Sectional Technologies | 1 | Active |
| US11796085B2 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Electricity | 1 | Active |
| US9644796B2 | Methods for in-situ calibration of a flow controller | Emerging Cross-Sectional Technologies | 1 | Active |
| US10428807B2 | Pump power consumption enhancement | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US9327252B2 | Compact device for enhancing the mixing of gaseous species | Performing Operations; Transporting | 0 | Active |
| US12106946B2 | Turbomolecular pump and cathode assembly for etching reactor | Electricity | 0 | Active |
| US11542598B2 | Systems and methods for pulse width modulated dose control | Electricity | 0 | Active |
| US12215421B2 | Systems and methods for pulse width modulated dose control | Electricity | 0 | Active |
| US8015989B2 | Method and apparatus for dampening pressure fluctuations in a fluid delivery system | Emerging Cross-Sectional Technologies | 0 | Active |
| US11834736B2 | Systems and methods for pulse width modulated dose control | Electricity | 0 | Active |
| US12253190B2 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Electricity | 0 | Active |
| US10114389B2 | Method and system for controlling a flow ratio controller using feedback | Physics | 0 | Active |
| US10108205B2 | Method and system for controlling a flow ratio controller using feed-forward adjustment | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.