Method and structure for reducing effects of noise and resonance associated with an e-beam lithography tool
US6800864B2 · kind B2 · utility
3Cited by
2References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2002 |
| Grant date | Oct 5, 2004 |
| Priority date | — |
| Expiry date | Oct 29, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30461
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for reducing noise and resonance detractors connected with and E beam tool. The invention provides a plurality of embodiments. In one embodiment, the E beam tool will be calibrated and the results will be then filtered to counter the effects of the noise afterwards. In an alternate embodiment of the present invention, a filter is applied in the actual feedback of the E beam tool for the writing cycle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.