Thin film magnetic head and method of manufacturing the same
US6801407B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 8, 2002 |
| Grant date | Oct 5, 2004 |
| Priority date | — |
| Expiry date | Feb 8, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49044
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A write gap film and a first magnetic material film are formed on a bottom pole, a first non-magnetic film is formed in a space formed by etching a portion of the first magnetic material film other than a portion extending from an air bearing surface to a throat height zero reference position to constitute a flat coplanar surface with the first magnetic material film, a second magnetic material film is formed on the flat coplanar surface, a two-layer track pole consisting of a top track pole and a bottom track pole is formed in a self-aligned manner by removing by RIE the second magnetic material film, first magnetic material film, write gap film and a part of the bottom pole, a second non-magnetic material film is formed to have a flat coplanar surface with the top track pole, and a thin film coil is formed on the flat coplanar surface. The thin film coil includes first and second thin film coil halves formed in a self-aligned manner, an insulating film interposed between successive coil windings of the first and second thin film coil halves and a jumper wiring electrically connecting an innermost coil winding of the first thin film coil half to an outermost coil winding of the se…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.