Micromechanical component with different doping types so that one type is anodized into porous silicon

US6803637B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hubert Benzel · Neckartenzlingen, DE
• Heribert Weber · Leverkusen, DE
• Hans Artmann · Magstadt, DE
• Frank Schaefer · Lörrach, DE

Key dates

• Filing date: Oct 28, 2002
• Grant date: Oct 12, 2004
• Expiry date: Oct 28, 2022

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0136
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component having a substrate made from a substrate material having a first doping type, a micromechanical functional structure provided in the substrate and a cover layer to at least partially cover the micromechanical functional structure. The micromechanical functional structure has zones made from the substrate material having a second doping type, the zones being at least partially surrounded by a cavity, and the cover layer has a porous layer made from the substrate material.