Process control based on tool health data
US6804619B1 · kind B1 · utility
9Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | Oct 12, 2004 |
| Priority date | — |
| Expiry date | Sep 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/37258
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is provided for a process control based on tool health data. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and determining at least one value associated with a health of a portion of the processing tool based on at least a portion of the received trace data. The method further comprises adjusting processing of another workpiece based on the determined health value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.