Precise monitor etalon calibration technique

US6807205B1 · kind B1 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Hans-Stephan Albrecht · Göttingen, DE
• Uwe Stamm · Göttingen, DE
• Wolfgang Zschocke · Göttingen, DE

Key dates

• Filing date: Jul 10, 2001
• Grant date: Oct 19, 2004
• Expiry date: Jul 10, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/1303
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for operating an excimer or molecular fluorine laser system at a stabilized wavelength includes generating a laser beam and directing a beam portion through a wavelength measurement system, calibrating the wavelength measurement system to an absolute reference, determining the wavelength of the laser beam including figuring in a drift compensation value of the wavelength, and tuning the wavelength to a target wavelength when the determined wavelength differs from the target wavelength.