In-line, pass-by method for vapor lubrication
US6808741B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 21, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Feb 20, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4582
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for performing simultaneous pass-by vapor deposition of a uniform thickness thin film of a lubricant on at least one surface of each of a plurality of substrates, comprising:(a) chamber means having an interior space adapted to be maintained at a reduced pressure below atmospheric pressure, including entrance and exit means at opposite ends thereof;(b) at least one linearly extending vapor source means for supplying the interior space of the chamber with at least one linearly extending stream of lubricant vapor;(c) a substrate/workpiece mounting/supporting means adapted for supporting thereon a plurality of substrates/workpieces; and(d) a transporter/conveyor means for continuously moving the substrate/workpiece mounting/supporting means transversely past the at least one linearly extending stream of lubricant vapor for depositing a uniform thickness thin film of lubricant on the surfaces of each of a plurality of substrates/workpieces carried by the substrate/workpiece mounting/supporting means.Embodiments of the method of the invention include depositing lubricant thin films on freshly deposited carbon-containing protective overcoats formed on disc-shaped magnetic an…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.