Multichip semiconductor device, chip therefor and method of formation thereof
US6809421B1 · kind B1 · utility
307Cited by
11References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 20, 1999 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Aug 20, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15331
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A multichip semiconductor device is disclosed in which chips are stacked each of which comprises a semiconductor substrate formed on top with circuit components and an interlayer insulating film formed on the top of the semiconductor substrate. At least one of the chips has a connect plug of a metal formed in a through hole that passes through the semiconductor substrate and the interlayer insulating film. The chip with the connect plug is electrically connected with another chip by that connect plug.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.