Inventor · Yokkaichi, JP

Mie Matsuo

58Patents
17h-index
88Co-inventors
87Inventor score

Filing activity: Jul 30, 1993 → Nov 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6809421B1 Multichip semiconductor device, chip therefor and method of formation thereof Electricity 307 Expired
US7053456B2 Electronic component having micro-electrical mechanical system Electricity 100 Expired
US5607718A Polishing method and polishing apparatus Electricity 78 Expired
US5775980A Polishing method and polishing apparatus Electricity 66 Expired
US5731634A Semiconductor device having a metal film formed in a groove in an insulating film Electricity 61 Expired
US6717251B2 Stacked type semiconductor device Electricity 55 Expired
US6791175B2 Stacked type semiconductor device Electricity 48 Expired
US6504227B1 Passive semiconductor device mounted as daughter chip on active semiconductor device Emerging Cross-Sectional Technologies 43 Expired
US7019364B1 Semiconductor substrate having pillars within a closed empty space Physics 37 Expired
US5561082A Method for forming an electrode and/or wiring layer by reducing copper oxide or silver oxide Electricity 32 Expired
US5424246A Method of manufacturing semiconductor metal wiring layer by reduction of metal oxide Electricity 31 Expired
US6734568B2 Semiconductor device and method of manufacturing the same Electricity 28 Expired
US7427797B2 Semiconductor device having actuator Electricity 28 Expired
US7235456B2 Method of making empty space in silicon Physics 25 Expired
US6991964B2 Stacked type semiconductor device Electricity 19 Expired
US7507634B2 Method for fabricating a localize SOI in bulk silicon substrate including changing first trenches formed in the substrate into unclosed empty space by applying heat treatment Physics 19 Active
US7808064B2 Semiconductor package including through-hole electrode and light-transmitting substrate Electricity 18 Active
US6709966B1 Semiconductor device, its manufacturing process, position matching mark, pattern forming method and pattern forming device Electricity 17 Expired
US7829975B2 Multichip semiconductor device, chip therefor and method of formation thereof Electricity 15 Active
US6812557B2 Stacked type semiconductor device Electricity 15 Expired
US7402903B2 Semiconductor device Electricity 12 Expired
US7095112B2 Semiconductor device, semiconductor package member, and semiconductor device manufacturing method Electricity 12 Expired
US8283755B2 Multichip semiconductor device, chip therefor and method of formation thereof Electricity 10 Active
US7238919B2 Heating element movement bonding method for semiconductor components Emerging Cross-Sectional Technologies 10 Expired
US7335517B2 Multichip semiconductor device, chip therefor and method of formation thereof Electricity 10 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.