Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell
US6809510B2 · kind B2 · utility
7Cited by
7References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2001 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Feb 9, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67727
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A configuration for treating wafers in at least one clean room includes a configuration of production units and measuring units that receive wafers via a transport system for transporting cassettes. Several functionally allocated production units and/or measuring units are combined to form a manufacturing cell which is provided with a loading and unloading station for receiving and forwarding cassettes with wafers. Individual wafers can be supplied to the production units and/or measuring units within the manufacturing cell in order to be treated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.