System and methods for imaging employing a levitating conveyor
US6810297B2 · kind B2 · utility
18Cited by
27References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Dec 27, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67784
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substrate flattening functionality, and a scanning or imaging device, and scanning and imaging systems and methodologies employing such article conveying systems and methodologies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.