Apparatus and method for mass flow controller with network access to diagnostics
US6810308B2 · kind B2 · utility
34Cited by
23References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87298
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.