Micromachined component and method of manufacture
US6811714B1 · kind B1 · utility
38Cited by
10References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2000 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Dec 30, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00928
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a micromachined component includes using a first liquid to etch a first layer (140) located underneath a second layer (150), exposing the second layer to a second liquid that is inorganic and miscible in carbon dioxide, and supercritical drying the micromachined component with carbon dioxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.