Linear motor driven mechanism using flexure bearings for opto-mechanical devices
US6813225B2 · kind B2 · utility
13Cited by
17References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2001 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Dec 14, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for moving an optical element in an opto-mechanical system, includes at least one circularly symmetric flexure surrounding the optical element, and a device for moving the optical element along an axis perpendicular to and extending through the center of the flexure. A number of flexures may be provided in a stack with spacers therebetween, and the optical element may be mounted in a tubular member supported by two spaced apart stacks. Structure is also provided for damping end of movement vibrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.