Patent · US Expired

Method and device for controlling thickness during spin coating

US6814825B2 · kind B2 · utility

13Cited by

5References

9Claims

0Family size

Assignee

SINGULUS TECHNOLOGIES AG · DE

Inventors

Wolfgang Becker · Eppstein, DE
Edgar Rueth · Isselburg, DE
Reinhard Gerigk · Gelnhausen, DE
Eggo Sichmann · Gelnhausen, DE

Key dates

Filing date	Jan 27, 1999
Grant date	Nov 9, 2004
Priority date	—
Expiry date	Jan 27, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG11B7/26
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

The invention relates to a method and a device for regulating the thickness of coatings or layers, in particular of bond coatings, wherein bonding is controlled in a programmed manner thereby taking into account the influence of disturbance variables. The invention can be used especially in the production of DVDs. The advantages of the present invention are reproducible accuracy in adjusting the thickness of the coating/bond coating and thus an increased production output.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.