Determining composition of mixed dielectrics
US6815974B1 · kind B1 · utility
2Cited by
20References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2003 |
| Grant date | Nov 9, 2004 |
| Priority date | — |
| Expiry date | Jul 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Techniques for determining the composition of mixed dielectric layers are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.