Mounting apparatus for an optical element

US6816325B1 · kind B1 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jochen Becker · Oberkochen, DE
• Bernhard Gellrich · Aalen, DE
• Werner Lang · Calw, DE
• Alexander Kohl · Aalen, DE
• Sascha Kraus · Aalen, DE

Key dates

• Filing date: Sep 11, 2003
• Grant date: Nov 9, 2004
• Expiry date: Sep 11, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/023
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In the case of a mounting apparatus, an optical element having an inner mount and an outer mount, in particular a lens in a projection lens system for semiconductor lithography, the inner mount is connected to the outer mount via three circumferentially distributed articulations. Manipulators, whereby said inner mount is displaceable, act on the articulations. The articulations comprise a mechanism which transforms a radial movement into an axial movement.