End effector alignment tool for substrate handling system
US6820349B2 · kind B2 · utility
7Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2002 |
| Grant date | Nov 23, 2004 |
| Priority date | — |
| Expiry date | Sep 30, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An end effector alignment tool for properly aligning the end effector arm with a prealigner and separately with a top plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.