Patent · US Expired

Method for measuring localized region lattice strain by means of convergent beam electron diffraction, and measurement device thereof

US6822234B2 · kind B2 · utility

2Cited by
0References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 8, 2003
Grant dateNov 23, 2004
Priority date
Expiry dateAug 8, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N23/20
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

According to the invention, a plurality of points in the HOLZ pattern are substituted for a plurality of Hough transform images by means of the Hough transform, according to an image processing of image data that includes a plurality of pixels obtained by opto/electric converting a HOLZ pattern; clusters of the Hough transform images are extracted; and HOLZ lines are then specified by means of reverse transformation of these clusters. Therefore, HOLZ lines can be specified by means of predetermined calculation steps without an arbitrary HOLZ line specification step being performed by a person performing the measurement. It is thus possible to increase the accuracy with which HOLZ lines are specified.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.