Method for measuring localized region lattice strain by means of convergent beam electron diffraction, and measurement device thereof
US6822234B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 8, 2003 |
| Grant date | Nov 23, 2004 |
| Priority date | — |
| Expiry date | Aug 8, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to the invention, a plurality of points in the HOLZ pattern are substituted for a plurality of Hough transform images by means of the Hough transform, according to an image processing of image data that includes a plurality of pixels obtained by opto/electric converting a HOLZ pattern; clusters of the Hough transform images are extracted; and HOLZ lines are then specified by means of reverse transformation of these clusters. Therefore, HOLZ lines can be specified by means of predetermined calculation steps without an arbitrary HOLZ line specification step being performed by a person performing the measurement. It is thus possible to increase the accuracy with which HOLZ lines are specified.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.