Optical systems for measuring form and geometric dimensions of precision engineered parts
US6822745B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2001 |
| Grant date | Nov 23, 2004 |
| Priority date | — |
| Expiry date | Oct 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate system; interferometrically profiling a second surface of the test object in a second coordinate system different from the first coordinate system; providing a relationship between the first and second coordinate system; and calculating the geometric property based on the interferometrically profiled surfaces and the relationship between the first and second coordinate system. In some embodiments, the relationship may be determined by using calibrated gage blocks or by using a displacement measuring interferometer. Corresponding system are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.