Method and apparatus for performing atomic force microscopy measurements
US6823723B2 · kind B2 · utility
3Cited by
7References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | Jul 25, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is related to a method and apparatus for performing Atomic Force Microscopy. In the method of the invention, a force profile is defined, and a sample is scanned by the AFM probe in such a way that the force between the sample and the probe is changed according to said predefined profile. The invention is equally related to an apparatus with which to perform said method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.