Sensor signal transmission from processing system
US6823753B1 · kind B1 · utility
8Cited by
33References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 16, 2003 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | May 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.