Broadband distribution of SECS-II data
US6826439B1 · kind B1 · utility
14Cited by
21References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2000 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | May 23, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention relates to an equipment interface which obtains data communicated between a tool, such as a semiconductor manufacturing tool, and its host computer system in real-time via a point-to-point connection. The equipment interface distributes the data automatically and continually to other remote application programs without the need for hardware to be added to the tool or to the host computer system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.