Patent · US Expired

Objective with at least one aspheric lens

US6831794B2 · kind B2 · utility

8Cited by

4References

12Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Karl-Heinz Schuster · Oberkochen, DE
Frank Schillke · Aalen, DE
Franz-Josef Stickel · Aalen, DE
Alexander Epple · Aalen, DE

Key dates

Filing date	Jun 21, 2003
Grant date	Dec 14, 2004
Priority date	—
Expiry date	Jun 21, 2023

Classification

Technology area (CPC G)Physics
CPC primaryG02B13/22
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A lens has at least one aspheric lens surface, an objective with at least one aspheric lens surface, and a projection exposure device for microlithography and a method for the production of microstructured components with an objective having at least one aspheric lens surface. The object of the invention is to provide a method by which new designs with aspheric lens surfaces can be generated without consultation with manufacturing, with this object attained by the measure of describing the aspheric lens surfaces by Zernike polynomials, which makes it is possible to undertake a classification of aspheric lens surfaces such that the respective aspheric lens surface can be polished and tested at a justifiable cost when at least two of three, or all three, of certain conditions are present.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.