Alexander Epple
84Patents
16h-index
51Co-inventors
87Inventor score
Filing activity: Oct 1, 2001 → Jun 13, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7085075B2 | Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 | Physics | 65 | Expired |
| US7209292B2 | Projection objective, especially for microlithography, and method for adjusting a projection objective | Physics | 46 | Expired |
| US7190530B2 | Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 | Physics | 45 | Expired |
| US7187503B2 | Refractive projection objective for immersion lithography | Physics | 39 | Expired |
| US7256932B2 | Optical system for ultraviolet light | Physics | 36 | Expired |
| US7385756B2 | Catadioptric projection objective | Physics | 35 | Expired |
| US6995930B2 | Catadioptric projection objective with geometric beam splitting | Physics | 23 | Expired |
| US6765729B2 | Catadioptric reduction lens | Physics | 22 | Expired |
| US6806942B2 | Projection exposure system | Physics | 22 | Expired |
| US8345350B2 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Physics | 20 | Active |
| US6788387B2 | Lithographic objective having a first lens group including only lenses having a positive refractive power | Physics | 19 | Expired |
| US7046459B1 | Catadioptric reductions lens | Physics | 18 | Expired |
| US7006304B2 | Catadioptric reduction lens | Physics | 18 | Expired |
| US7136220B2 | Catadioptric reduction lens | Physics | 18 | Expired |
| US7203010B2 | Catadioptric projection objective | Physics | 16 | Expired |
| US7463422B2 | Projection exposure apparatus | Physics | 16 | Active |
| US8390784B2 | Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure method | Physics | 15 | Active |
| US7426082B2 | Catadioptric projection objective with geometric beam splitting | Physics | 14 | Expired |
| US8107162B2 | Catadioptric projection objective with intermediate images | Physics | 14 | Active |
| US6717746B2 | Catadioptric reduction lens | Physics | 11 | Expired |
| US7712905B2 | Imaging system with mirror group | Physics | 9 | Active |
| US9235136B2 | Projection exposure apparatus for projection lithography | Physics | 8 | Active |
| US7697198B2 | Catadioptric projection objective | Physics | 8 | Expired |
| US6831794B2 | Objective with at least one aspheric lens | Physics | 8 | Expired |
| US8208199B2 | Catadioptric projection objective | Physics | 7 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.