Stabilization technique for high repetition rate gas discharge lasers

US6834066B2 · kind B2 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Igor Bragin · Göttingen, DE
• Vadim Berger · Oebisfelde, DE
• Juergen Kleinschmidt · Oettingen, DE

Key dates

• Filing date: Apr 18, 2001
• Grant date: Dec 21, 2004
• Expiry date: Jul 14, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/0975
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Method and system for providing stabilization techniques for high repetition rate gas discharge lasers with active loads provided in the discharge circuitry design which may include a resistance provided in the discharge circuitry.