Molecular fluorine laser with intracavity polarization enhancer

US6834069B1 · kind B1 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Elko Bergmann · Oettingen, DE
• Frank Voss · Berlin, DE
• Klaus Vogler · Eckental, DE

Key dates

• Filing date: Jun 3, 2002
• Grant date: Dec 21, 2004
• Expiry date: Jun 3, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/1055
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A F2 laser includes a laser tube filled with a laser gas mixture at least including molecular fluorine for generating a spectral emission including multiple closely-spaced lines in a wavelength range between 157 nm and 158 nm, including a first line centered around 157.62 nm and a second line centered around 157.52 nm, multiple electrodes within the discharge chamber connected with a power supply circuit for energizing the molecular fluorine, a laser resonator including a line selection unit for selecting one of the first and second lines of the multiple closely spaced lines and for supressing the other of the first and second lines, for generating a narrow bandwidth VUV output beam, and at least one intracavity polarizing element. The narrow bandwidth VUV output beam is polarized at least 95%, and may be 98% or more.