Antireflective, layer-forming composition, layer configuration containing the antireflective layer, and process for producing the antireflective layer

US6835456B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Andreas Walter · Egloffstein, DE
• Recai Sezi · Simmerath, DE

Key dates

• Filing date: May 23, 2002
• Grant date: Dec 28, 2004
• Expiry date: Jul 6, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31725
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

A layer-forming antireflective composition is proposed which contains as a base polymer poly(hydroxyamide) or polybenzoxazole and as dye component at least one dye from the classes of the methine dyes, methine dye derivatives, azomethine dyes, azomethine dye derivatives, coumarin dyes, coumarin dye derivatives, triphenylmethane dyes, triphenylmethane dye derivatives and/or an azo dye.