Chemical prefiltering for phase differentiation via simultaneous energy dispersive spectrometry and electron backscatter diffraction
US6835931B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2003 |
| Grant date | Dec 28, 2004 |
| Priority date | — |
| Expiry date | May 15, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/203
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analytical method for combining chemical information with crystallographic information to obtain a map of the crystal orientation, the nature of grain boundaries, and distinguishing crystalline phases in a polycrystalline sample, including the steps of providing a sample with a prescribed grid of points thereon, selecting a point, applying a collimated electron beam to the point to obtain an electron backscatter diffraction (EBSD) pattern and the elemental composition of the sample at the point. Recording the information and repeating for each point in the grid and determining the crystalline phases in the sample. An instrument capable of performing the method includes an SEM having means for applying an electron beam to a sample, means for obtaining an EBSD pattern (EBSP), and means for determining the composition of the sample, as well as means for recording EBSD band locations and characteristics and the elemental composition of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.