Patent · US Expired

Flat-object holder and method of using the same

US6837776B2 · kind B2 · utility

22Cited by
5References
10Claims
0Family size

Assignees

Inventors

Key dates

Filing dateJul 31, 2002
Grant dateJan 4, 2005
Priority date
Expiry dateNov 14, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB24B37/30
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A flat-object holder can hold a flat object-and-frame assembly, and the holder has the flat object fixed to the frame with protection tape. The flat-object holder includes at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame. The flat-object holder bearing the flat object-and-frame assembly can be fixedly held by a selected chuck table by applying a negative pressure to the flat object supporting area. The flat-object holder can transfer and put the flat object-and-frame assembly in a container. Thus, no matter how thin the flat object may be, it can be handled without the fear of breaking.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.