Method of manufacturing semiconductor device
US6838371B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2003 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Sep 4, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3212
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
At the time of performing a polishing process on a tungsten film and a silicon oxide film, based on the relation between a residual step and pattern density preliminarily obtained while changing polishing parameters, from pattern density of plugs in the polishing step and a predetermined residual step required, polishing parameters are determined so that a residual step does not exceed a predetermined residual step “h”. With the determined polishing parameters, the polishing process is performed on the tungsten film and the silicon oxide film so that the films are planarized, and plugs are formed in contact holes. As a result, a semiconductor device in which a step does not exceeds a predetermined residual step by a polishing process is obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.