Light spot position sensor and displacement measuring device
US6838688B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2001 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Oct 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a displacement measuring device of which assembled state can be determined optically with ease. There is also provided a light spot position sensor usefully applicable in determination of the assembled state of the displacement measuring device. An optical encoder comprises a scale and a sensor head that is arranged opposite to the scale and can move relative to the scale. The sensor head includes a sensor substrate, on which an index grating and a photosensitive device array are formed. The sensor substrate is also employed to mount a light spot position sensor and a light source for providing a light beam entering the light spot position sensor via the scale to configure a state detection system for detecting an assembled state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.