System and software for database structure in semiconductor manufacturing and method thereof
US6839713B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2001 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | May 26, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99945
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The functionality of various process control and data collection system embodiments may be improved by employing the database methodology disclosed herein during the requirements-analysis phase for data collection and process control in a semiconductor manufacturing environment. The relational database storage technology as disclosed herein consists of a set of interconnected tables, where each table has a field or an amalgamation of fields (primary key) that uniquely identifies each record (tuple) in the table. In addition, the method as disclosed herein utilizes foreign keys, which represent the value of a primary key for a related table. Aggregation levels are also employed in the method as disclosed herein to associate data from various production
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.