Patent · US Expired

Method of producing micromechanical structures

US6839962B2 · kind B2 · utility

3Cited by

50References

14Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Robert Aigner · Winter Garden, US
Florian Plötz · Regensburg, DE
Sven Michaelis · Birkenfeld, DE
Michael Brauer · Austin, US

Key dates

Filing date	Jun 24, 2002
Grant date	Jan 11, 2005
Priority date	—
Expiry date	Mar 31, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T83/0581
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.