Micromechanical component and pressure sensor having a component of this type

US6840111B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hubert Benzel · Neckartenzlingen, DE
• Heribert Weber · Leverkusen, DE
• Frank Schaefer · Lörrach, DE

Key dates

• Filing date: Sep 29, 2002
• Grant date: Jan 11, 2005
• Expiry date: Sep 29, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0052
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical component in which lateral deformations, i.e., deformations of the component parallel to its two main surfaces, are concentrated in a defined area of the component structure, making it possible to decouple lateral and vertical stresses in the component. The component structure includes at least one bellows-like structure in which lateral deformations of the component are concentrated. A pressure sensor having a micromechanical component of this type may be used, for example, for measured-value detection.