Vent for an optical pellicle system
US6841317B2 · kind B2 · utility
4Cited by
14References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 27, 2002 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Aug 27, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides an optical pellicle system which includes a frame having a top side and bottom side, a pellicle membrane configured to cover the top side of the frame, a photomask to which the bottom side of the frame is mounted, and at least one venting slot defined in the photomask, extending under the frame from an area defined within the frame to an area outside of the frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.