Fusion attachment of rigid pellicles and/or frames
US6842227B2 · kind B2 · utility
6Cited by
4References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 6, 2003 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Mar 6, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.