Emily Shu
22Patents
7h-index
23Co-inventors
69Inventor score
Filing activity: Dec 21, 1992 → Oct 16, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5544478A | Optical sensing of combustion dynamics | Emerging Cross-Sectional Technologies | 67 | Expired |
| US6599028B1 | Fiber optic sensors for gas turbine control | Physics | 41 | Expired |
| US5290398A | Synthesis of tapers for fiber optic sensors | Physics | 33 | Expired |
| US5569911A | Fiber optic system for remote fluorescent sensing using excitation and return fibers | Physics | 24 | Expired |
| US5608515A | Double window for protecting optical sensors from hazardous environments | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5978525A | Fiber optic sensors for gas turbine control | Mechanical Engineering; Lighting; Heating | 22 | Expired |
| US6978074B2 | Fiber optic sensors for gas turbine control | Physics | 11 | Expired |
| US6842227B2 | Fusion attachment of rigid pellicles and/or frames | Physics | 6 | Expired |
| US6486487B2 | Apparatus and method for measuring and selectively adjusting a clearance | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US6842228B2 | Fusion attachment of rigid pellicles and/or frames | Physics | 5 | Expired |
| US6834549B2 | Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array | Physics | 4 | Expired |
| US8929051B2 | Apparatus and method for holding a wafer | Electricity | 2 | Active |
| US9054021B2 | Transistors and fabrication method | Electricity | 2 | Active |
| US9049774B2 | EUVL light source system and method | Electricity | 1 | Active |
| US9176400B2 | System and method for reducing contamination in extreme ultraviolet lithography light source | Electricity | 1 | Active |
| US8917489B2 | Apparatus and method for holding a wafer | Electricity | 1 | Active |
| US9665017B2 | Method for reducing contamination in extreme ultraviolet lithography light source | Electricity | 1 | Active |
| US5580741A | Chemiluminescence immunoassay for chlorinated aromatic compound detection | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6279400A | Apparatus and method for measuring and selectively adjusting a clearance | Mechanical Engineering; Lighting; Heating | 1 | Expired |
| US7759024B2 | Controlling shape of a reticle with low friction film coating at backside | Physics | 0 | Active |
| US9706632B2 | EUV light source and exposure apparatus | Electricity | 0 | Active |
| US5936718A | Method for detecting fiber misalignment in composite manufacturing | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.