Imaging system and method for positioning a measuring tip onto a contact region of a microchip

US6842260B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Stefan Dietrich · Potsdam, DE
• Manfred Dobler · Hersbruck, DE
• Thilo Marx · Villingen-Schwenningen, DE
• Peter Mayer · Neubiberg, DE

Key dates

• Filing date: May 28, 2002
• Grant date: Jan 11, 2005
• Expiry date: Aug 6, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/14
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The imaging system provides assistance during the positioning of a measuring tip as it is placed onto a contact region of a microchip, in order to measure an on-chip signal. The contact region is imaged in a magnified fashion. An insertion device is provided that is suitable for providing a display of the on-chip signal in the imaging plane.