Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers
US6844272B2 · kind B2 · utility
16Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2002 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Mar 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/24
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.