Patent · US Expired

Microelectromechanical system and method for producing displacement multiplication

US6844657B2 · kind B2 · utility

12Cited by
9References
51Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 14, 2002
Grant dateJan 18, 2005
Priority date
Expiry dateMar 14, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH02N1/008
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A microelectromechanical system is disclosed that provides amplified movement without requiring the use of a displacement multiplier. Generally, a lever or the like is interconnected with a substrate on which the system is fabricated at a first location, while a free end of the lever is able to move relative to the substrate, typically at least generally about the first location. One or more actuators are movably interconnected with the substrate, and in turn are interconnected with the lever at a location that is somewhere between the free end and the first location. The lever may be configured to move at least generally away from the substrate upon movement of the actuator in one direction, at least generally toward the substrate upon movement of the actuator in another direction, or in any direction and in any manner. The movement of the “free” end of the lever may be used to perform any function, including lifting/pivoting a mirror away from/relative to the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.