Spatial light modulators with light absorbing areas
US6844959B2 · kind B2 · utility
179Cited by
10References
46Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2002 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Nov 26, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.