Electrical line end shortening quantification
US6845493B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 15, 2003 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Apr 15, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/39
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The present invention enables the quantification of line end shortening by utilizing a pattern of multiple conductive paths, each conductive path can include a conductor at each end, each conductor connected to a separate contact with the contacts connected by a polysilicon conductor. The conductors can vary in length by a constant increment from conductive path to conductive path, beginning with a length that results in a significant overlap at the contacts to a length that results in a significant underlap at the contacts. Resistance measurements of each conductive path can be made until a change either to or from an “open” occurs; this is the point from which, using the constant increment, the LES can be characterized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.