Ink-jet printhead and method of manufacturing the same
US6848772B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 25, 2003 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | Apr 25, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1646
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ink-jet printhead and a method of manufacturing the ink-jet printhead include forming an insulating layer on a surface of a substrate, forming a metallic thin layer on the insulating layer, pattering the metallic thin layer through dry etching to form a plurality of pairs of conductors corresponding to a plurality of heaters to be formed in a subsequent operation, forming a resistant material layer on the substrate, patterning the resistant material layer through dry etching to form the heaters corresponding to the conductors, forming a nonconductive heat transfer layer on the substrate so as to cover the heaters and the conductors, forming a passage plate providing an ink chamber, in which each of the heaters are placed, on the substrate, and forming a nozzle plate having a nozzle corresponding to each ink chamber on the passage plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.